Electronic Grade Hydrogen is an ultra-high-purity hydrogen gas engineered specifically for semiconductor fabrication, electronics manufacturing, flat-panel displays, LEDs, and photovoltaic (solar) cell production. In these environments, even atomic-level contamination can cause wafer defects, yield loss, and irreversible circuit damage.
To meet these requirements, Electronic Grade Hydrogen is purified to 5N–9N purity levels (99.999%–99.9999999%), with impurities controlled down to parts-per-billion (ppb) or parts-per-trillion (ppt) levels. Production, packaging, and delivery are executed using ultra-clean materials and cleanroom-compatible systems.
Industry Standards & Compliance
SEMI C3 / SEMI C99 – Semiconductor gas purity standards
SEMI F20 / F112 – Gas delivery and contamination control
ASTM E260 / E262 – Trace impurity analysis
ISO 14687 (select limits)
CGMP & cleanroom gas-handling protocols
Key Characteristics
Ultra-high purity (5N to 9N)
Impurity control at ppb–ppt levels
Non-corrosive and non-oxidizing chemistry
Compatible with silicon, GaAs, InP, and compound semiconductors
High thermal conductivity and rapid diffusion
Long-term purity stability from source to point-of-use
Typical Physical & Chemical Properties
| Property | Typical Value |
|---|---|
| Chemical Formula | H₂ |
| Purity Range | 99.999% – 99.9999999% |
| Molecular Weight | 2.016 g/mol |
| Density (STP) | 0.0899 kg/m³ |
| Energy Content (LHV) | ~120 MJ/kg |
| Boiling Point | –252.9°C |
| Flammability Range | 4–75% in air |
| Auto-Ignition Temperature | ~585°C |
Typical Impurity Limits (Electronic Grade)
| Impurity | Typical Limit |
|---|---|
| Moisture (H₂O) | ≤ 1 ppb |
| Oxygen (O₂) | ≤ 1 ppb |
| Nitrogen (N₂) | ≤ 10 ppb |
| Carbon Monoxide (CO) | ≤ 0.05 ppb |
| Carbon Dioxide (CO₂) | ≤ 0.05 ppb |
| Methane (CH₄) | ≤ 0.1 ppb |
| Total Hydrocarbons | ≤ 0.1 ppb |
| Sulfur Compounds | ≤ 0.001 ppb |
| Particulates | None detectable |
Advanced Purification Technologies
Multi-stage Pressure Swing Adsorption (PSA)
Palladium membrane purification (6N–9N purity)
Cryogenic distillation for noble gas removal
Catalytic de-oxidation followed by molecular sieve drying
Ultra-drying systems achieving moisture <1 ppb
Packaging & Delivery Systems
Electropolished stainless steel cylinders
Internal passivation (SilcoNert® or equivalent)
Vacuum-baked and moisture-free filling
Cylinder pressures: 150 / 200 / 300 bar
Bulk tube trailers and on-site purification systems
VCR fittings, mass-flow controllers, inline analyzers
Applications
Semiconductor Fabrication: CVD, PECVD, epitaxy, wafer annealing
Display Manufacturing: OLED, micro-LED, flat panels
Photovoltaics: Thin-film deposition, passivation layers
Precision Manufacturing: Controlled atmospheres, reduction processes
R&D: Nanotechnology, MEMS, quantum components
Electronic vs Fuel Cell Grade Hydrogen
| Parameter | Electronic Grade | Fuel Cell Grade |
|---|---|---|
| Purity | 5N–9N | 3N–5N |
| Impurity Limits | ppb–ppt | ppm |
| Moisture Tolerance | Extremely Low | Moderate |
| Application Sensitivity | Extremely High | High |
| Cost | Premium | High |
Storage, Handling & Safety
Cleanroom-compatible systems (Class 100–1000)
Hydrogen detectors and automatic shut-off valves
Outgassing- and moisture-controlled materials
Compliance with SEMI S2, CGA G-5.3, NFPA 55, ISO 11114
Strategic Importance
Electronic Grade Hydrogen is mission-critical for advanced semiconductor nodes, high-efficiency solar cells, and next-generation electronics. Even a single impurity excursion can result in millions of dollars in wafer scrap, making hydrogen quality non-negotiable in this industry.